on 5 Mar 2003
Last Applicant/ Owned by
Tokyo Electron Limited
3-1, Akasaka 5-Chome Minato-Ku
Tokyo, , 107-6325
Serial Number
UK00903084654 filed on 5th Mar 2003
Registration Number
UK00903084654 registered on
9th Dec 2004
Correspondent Information
AA Thornton IP LLP
8th Floor, 125 Old Broad Street
London,
EC2N 1AR
Semi-conductor manufacturing machines and apparatus; flat panel display manufacturing machines and apparatus; plasma generating apparatus used for semi-conductor manufacturing machines and apparatus; plasma generating apparatus used for flat panel display manufacturing machines and apparatus.
UK00903084654
Word
Individual