on 23 Aug 2019
Last Applicant/ Owned by
Oxford Instruments Nanotechnology Tools Limited trading as Oxford Instruments Plasma Technology
Tubney Woods, Abingdon Oxon OX13 5QX
, ,
Serial Number
UK00801500961 filed on 23rd Aug 2019
Registration Number
UK00801500961 registered on
26th Jun 2020
Correspondent Information
Gill Jennings & Every LLP
The Broadgate Tower, 20 Primrose Street
London,
EC2A 2ES
Apparatus and instruments for thin film processing; apparatus and instruments for thin film processing namely, atomic layer deposition tools, chemical vapour deposition tools, etch tools and cluster tools; apparatus and instruments for thin film processing namely, atomic layer deposition tools, etch tools and cluster tools with automated handling; flexible plasma processing apparatus for plasma etching and plasma deposition.
UK00801500961
Word
Individual