on 21 Feb 2013
Last Applicant/ Owned by
SÜSS MicroTec SE
Schleissheimer Str. 90
Garching, , 85748
Serial Number
UK00911592771 filed on 21st Feb 2013
Registration Number
UK00911592771 registered on
21st Oct 2013
Correspondent Information
VOSSIUS & PARTNER PATENTANWÄLTE RECHTSANWÄLTE MBB
Siebertstr. 3
München,
81675
Machines for use in the microelectronic, semiconductor manufacturing and photolithography industry.
Lasers for industrial use; Laser steppers; microelectronic components; photolithography apparatus; electric and electronic devices for micro fabrication, namely mask aligners, lithography apparatus, projection scanners, laser apparatus, electronic sensors; MEMS (Micro-Electronic-Mechanical Systems) devices; mask aligners; projection devices including projection scanners.
UV light lamps.
UK00911592771
Figurative
Individual