steag MicroTech
machines, machine tools and apparatus, and plant and installations consisting thereof, all for use in the manufacture, processing and/or treatment of Read More
Classification Information
Class [7]
Machinery Products
Machines, machine tools and apparatus, and plant and installations consisting thereof, all for use in the manufacture, processing and/or treatment of semiconductor substrates, silicon slices, wafers, liquid crystal display substrates and units, semiconductor chips, solar cells, compact discs, video discs, compact disc ROM's and electronic and opto-electronic articles; parts and fittings for all the aforesaid goods.
Class [9]
Computer & Software Products & Electrical & Scientific Products
Electronic and electrical apparatus and instruments, all for cleaning, lacquering, etching, developing and/or stripping of semiconductor substrates, silicon slices and wafers, for etching and developing of masks in semiconductor chip manufacture, and for treatment and processing of wafers; spin-coating apparatus; coating apparatus for photo-sensitive lacquers, colour layers and resists; parts and fittings for all the aforesaid goods.
Class [11]
Environmental Control Instrument Products lighting heating cooling cooking
Apparatus and installations for drying treatment or wet treatment of semiconductor substrates, silicon slices, wafers, liquid crystal display substrates and units, semiconductor chips, solar cells, compact discs, video discs, compact disc ROM's and electronic and opto-electronic articles, including the surfaces thereof; apparatus and appliances and installations consisting thereof, all for drying, cleaning, etching and/or wet treatment of silicon slices in semiconductor chip manufacture; apparatus for drying, moistening and wetting; parts and fittings for all the aforesaid goods.
Class [37]
Construction and Repair Services
Installation, maintenance, repair and servicing of machines, machine tools, apparatus, appliances, installations and equipment used in manufacture, treatment, preparation, processing and handling of semiconductor substrates, silicon slices, wafers, liquid crystal display substrates and units, semiconductor chips, masks, solar cells, compact discs, video discs, compact disc ROM's and electronic and opto-electronic articles and materials.
