on 8 Jul 1999
Last Applicant/ Owned by
Entegris, Inc.
129 Concorde Road
Billerica,, , 01821-4600
Serial Number
UK00901233352 filed on 8th Jul 1999
Registration Number
UK00901233352 registered on
4th Sept 2000
Correspondent Information
Greaves Brewster LLP
Copa House, Station Road, Cheddar
Somerset,
BS27 3AH
Adsorbed gas provided in a gas supply container holding solid adsorbent material for use in the manufacture of semi-conductors and for use in other industrial process.
Metal gas supply containers holding solid adsorbent material on which adsorbed gas is stored and from which gas is desorbed for dispensig from the container.
Gas flow controllers and gas flow monitors.
UK00901233352
Word
Individual