on 17 Jun 2004
Last Applicant/ Owned by
Entegris, Inc.
129 Concorde Road
Billerica,, , 01821-4600
Serial Number
UK00903877784 filed on 17th Jun 2004
Registration Number
UK00903877784 registered on
25th Aug 2005
Correspondent Information
Greaves Brewster LLP
Copa House, Station Road, Cheddar
Somerset,
BS27 3AH
Machines for removing contaminants; machines and devices for removing contaminants from polished surfaces or silicon wafers; semiconductor manufacturing machines and equipment; parts and fittings for all the aforesaid goods.
Brush rollers and PVA (polyvinyl acetate) brush rollers; cleaning apparatus and brushes; cleaning apparatus, brushes, brush rollers and devices for removing contaminants from polished surfaces all for removing post-planarization detritus from silicon wafers.
UK00903877784
Word
Individual