on 5 Dec 2006
Last Applicant/ Owned by
MATTSON THERMAL PRODUCTS GMBH
Daimlerstr. 10 89160 Dornstadt
, ,
Serial Number
UK00800917904 filed on 5th Dec 2006
Registration Number
UK00800917904 registered on
3rd Mar 2008
Correspondent Information
Dr. Ulrich F. Geyer WAGNER & GEYER
Gewürzmühlstr. 5 80538 München
,
Machines for the treatment of substrates, semiconductor substrates, silicon discs and wafers for semiconductor chip manufacturing and for making semiconductor film or layer structures (expitaxial-reactors).
Apparatuses, devices, machines and systems consisting thereof for the thermal treatment of substrates, semiconductor substrates, silicon discs and wafers for the production of semiconductor chips; rapid heating apparatuses for the treatment and production of semiconductors, in particular on the basis of halogen lamps and arc lamps.
Maintenance and installation of the goods mentioned above.
Developing the goods mentioned above.
UK00800917904
Word
Individual