mks Technology for Productivity

Class [9]
Computer & Software Products & Electrical & Scientific Products

Sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement and control of fluid pressure, vacuum and flow; process monitors; residual gas analysers; optical monitors; quadrapole mass spectrometers; digital control network products; radio frequency, direct current and microwave power supplies and generators; ozone generators; plasma sources and reactive gas generators; mass flow controllers; valves; heaters; gas sticks; gas boxes; gas filters and purifiers; pumps; heaters; leak detectors; gas detecting and analysis equipment; calibration equipment for pressure and flow transducers, and for flow meters; serial gateways and high density input/output controllers; apparatus components for material processing; namely gauge systems, gauges, transducers, fittings, flanges, valves, heated lines and traps; equipment for delivering liquid reactant materials to a process reactor; in situ flow verifier for process or purge gases; vacuum sensing and switching equipment, namely, vacuum sensor switches; hardware and software for measuring the transmissivity, reflectivity, optical density and thickness of thin metal films, and for providing topographical images of the same; software for operating optical spectrometers; quadrapole mass spectrometers; software for determining the presence and measurement of residual contaminants in a semiconductor process; electronic control accessories, namely, micro-processor based data communication units for communicating between quadrapole mass analysers and a computer.