MARATHON

Class [7]
Machinery Products

Semiconductor device manufacturing machines; semiconductor wafer processing equipment for use in the manufacture of semiconductor devices; semiconductor substrate manufacturing machines; semiconductor wafer processing machines for use in the manufacture of semiconductor devices; semiconductor wafer processing equipment, namely, enclosures for containing industrial robots used in transporting semiconductor wafers and devices for use in the manufacture of semiconductor devices; semiconductor wafer processing equipment, namely, pressure vessels for containing industrial robots used in transporting semiconductor wafers and devices for use in the manufacture of semiconductor devices; semiconductor wafer processing equipment, namely, industrial robots and enclosures used in transporting semiconductor wafers and devices for use in the manufacture of semiconductor devices; machines for manufacturing semiconductor devices; machines for transporting semiconductor wafers for use in manufacturing automation; cluster-tool integration platforms used in the manufacture of integrated circuits and semiconductor devices.