on 3 Nov 1994
Last Applicant/ Owned by
STEAG MicroTech GmbH
Carl-Benz-Strasse 10, 72124 Pliezhausen, Germany
, ,
Serial Number
UK00002001646 filed on 3rd Nov 1994
Registration Number
UK00002001646 registered on
15th Sept 1995
Correspondent Information
Dr Walther Wolff & Co
Sherwood House,, 5 Bluecoats Avenue
Hertford,
Hertfordshire,
SG14 1PB
Machines, machine tools and apparatus, all for use in the manufacture, processing and treatment of semiconductor substrates, silicon slices, liquid crystal display devices, solar cells and other electronic and opto-electronic articles; parts and fittings for all the aforesaid goods.
Apparatus for drying treatment and wet treatment of semiconductor substrates, silicon slices, liquid crystal display devices, solar cells and other electronic and opto-electronic articles, including the surface thereof; apparatus for drying, moistening and wetting; parts and fittings for all the aforesaid goods.
Installation, maintenance, repair and servicing of machines, machine tools, apparatus and equipment used in manufacture, processing, treatment, drying and wetting of semiconductor substrates, silicon slices, liquid crystal display devices, solar cells and other electronic and opto-electronic articles, including the surfaces thereof.
UK00002001646
Word
Individual