on 6 Mar 2003
Last Applicant/ Owned by
Tokyo Electron Limited
3-1, Akasaka 5-Chome Minato-Ku
Tokyo, , 107-6325
Serial Number
UK00903085487 filed on 6th Mar 2003
Registration Number
UK00903085487 registered on
9th Dec 2004
Correspondent Information
STAEGER & SPERLING PARTG MBB
Sonnenstr. 19
München,
80331
Measuring machines and instruments using optical signals for use in manufacturing processes of semiconductor manufacturing machines; measuring machines and instruments using optical signals for use in manufacturing processes of flat panel display manufacturing machines and apparatus; measuring instruments for use in manufacturing processes of semiconductor manufacturing machines and flat panel display manufacturing machines.
UK00903085487
Word
Individual