Classification Information
Class [7]
Machinery Products
Microelectronic processing capital equipment; liquid, gas phase, and cryogenic equipment for processing microelectronics, for example, semiconductor wafers, flat panel displays, and thin film heads; electronically-controlled spray apparatus for processing semiconductors wafers by acid etching, cleaning, and rinsing; semiconductor wafer cleaning machines using ultrasonic frequency pressure waves in liquid bath; drying machines for semiconductor wafers and for disks, substrates, and panels; machines for cleaning and chemically processing semiconductor wafers, masks and substrates, with gases and sprayed liquids and sprayed cryogenic chemicals in the production of integrated circuit chips and similar products; surface conditioning equipment; microlithography apparatus for use with semiconductor wafers, flat panel displays and thin film heads, in particular, photoresist processing systems, priming apparatus, bake apparatus, chill apparatus, photoresist coating apparatus, photoresist removal apparatus, handling apparatus, robotic handling apparatus and computer control apparatus; photolithographic apparatus for use with semiconductor wafers, flat panel displays, and thin film heads; electronically-controlled spray apparatus for processing silicon wafers requiring solvent stripping, cleaning, photoresist developing, and rinsing; electronically-controlled spray apparatus for processing, etching, and cleaning semiconductor wafers; electronically-controlled spray apparatus for processing silicon wafers by rinsing and drying; semiconductor wafer processing apparatus for removing oxide films by etching; chemical collection systems, in particular, for the collection of solvents or hot acids; spray tool interfaces; managing, handling, processing, distributing, delivering, dispensing, metering, collecting, diluting, mixing, blending, filtering, sampling, batching, cleaning, and purifying apparatus and systems, all being for chemicals and/or slurries; valves and flow control; and air and gas handling devices for such machines and valves; chemical delivery apparatus; bulk chemical metering and delivery apparatus for the delivery of liquids, in particular aqueous or solvent chemicals; chemical delivery modules, in particular pumps and filters drawing liquid chemicals from a supply drum and delivery of the chemicals to a point of use; chemical blending and mixing apparatus, aqueous chemical blending apparatus; chemical dilution and mixing apparatus, in particular for liquid chemicals or slurries; spray tool apparatus; chemical filtration and distribution systems; chemical generation systems; chemical metering and delivery systems; parts and fittings for all the aforesaid goods; but not including any such goods for use as machines for use in the manufacture or mechanical handling of containers or of component parts thereof or machines for closing containers and not including filters or any goods similar to these excluded goods; parts and fittings for all the aforesaid goods.
Class [9]
Computer & Software Products & Electrical & Scientific Products
Microelectronics and semiconductor manufacturing machines for cleaning, etching, stripping, processing and manufacturing silicon wafers, integrated circuits, semiconductors, semiconductor substrates and microelectronic services and devices; liqud and gas phase spray machines for processing semiconductor wafers; semiconductor wafer cleaning machines using ultrasonic frequency pressure waves in a liquid bath; drying machines for semiconductor wafers and for discs, substrates and panels; bulk liquid chemical metering and delivery apparatus; managing dispensing, metering, collection, diluting, mixing, blending, filtering, sampling, batching, cleaning and purifying apparatus and systems, all being for chemicals and/or slurries; pumpless chemical distribution systems; apparatus for the dilution, mixing and dispensing of slurries of cleaning chemicals; chemical delivery apparatus; bulk chemical metering and delivery apparatus for the delivery of liquids, in particular, aqueous or solvent chemicals; chemical delivery modules in particular pumps, filters, and flow lines drawing liquid chemicals from a supply drum and delivery of the chemicals to a point of use; chemical blending and mixing apparatus, aqueous chemical blending apparatus; chemical dilution and mixing apparatus, in particular, for liquid chemicals or slurries; chemical delivery systems, in particular, systems for the delivery of liquids, aqueous or solvent chemicals or slurries; apparatus for use in chemical delivery systems, in particular, chemical blending apparatus, chemical dilution apparatus, chemical dilution and mixing apparatus, chemical metering and deliverying apparatus, chemical mixing and delivery apparatus, apparatus for production of batches of chemicals, apparatus for taking of samples of chemicals, spray tool apparatus; chemical filtration and distribution systems; electronic automatic apparatus for drawing liquid chemicals for delivering and controlling the delivery of chemicals to a point of use remote from a bulk source; chemical generation systems; precious metal chemical metering and delivery systems; partially spent chemical collecting systems; computer software for chemical delivery systems; computer software for monitoring and/or controlling the above apparatus and for monitoring and/or controlling manufacturing equipment for semiconductors, flat panel displays, and thin film heads, and electronic control apparatus for chemical distribution systems, computer software for use in chemical delivery systems or semiconductor processing equipment; semiconductor wafer cleaning machines using ultrasonic frequency pressure waves in liquid bath; surface conditioning products; microlithography apparatus for use with semiconductor wafers, flat panel displays, and thin film heads, in particular, photoresist processing systems, priming apparatus, bake apparatus, chill apparatus, photoresist coating apparatus, photoresist removal apparatus, handling apparatus, robotic handling apparatus and computer control apparatus; automatic pager system; electrically ventilated cabinets for use in refining a chemical in a supply drum; computer control apparatus; parts and fittings for all the aforesaid goods; but not including computer software other than computer software for use in chemical delivery systems or semi-conductor and/or microelectronics processing equipment, parts and fittings for all the aforesaid goods.
Class [11]
Environmental Control Instrument Products lighting heating cooling cooking
Water heaters; distributing, dispensing, metering, collecting, filtering, cleaning and purifying apparatus and systems, all being for chemicals and/or slurries; microlithography apparatus for use with semiconductor wafers, flat panel displays, and thin film heads, in particular bake apparatus and chill apparatus; water heaters; ventilating apparatus; valves and flow control apparatus; chemical filtration and distribution systems; parts and fittings for all the aforesaid goods; but not including liquid filters or any goods similar to these excluded goods; parts and fittings for all the aforesaid goods.
