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high brightness, submicron ion and electron beam columns using field emission technology for scientific and laboratory use, namely, focused ion beam c Read More

Classification Information

Class [9]
Computer & Software Products & Electrical & Scientific Products

High brightness, submicron ion and electron beam columns using field emission technology for scientific and laboratory use, namely, focused ion beam columns for ion lithography, ion beam milling, secondary ion mass spectroscopy and mask repair; focused electron beam columns for scientific and laboratory use, namely, electron beam lithography, electron beam microscopy, and liquid metal ion sources.

Mark Details

Serial Number

UK00801491255

Mark Type

Word

Kind of mark

Individual