on 22 May 2015
Last Applicant/ Owned by
Evatec AG
Hauptstrasse 1a CH-9477 Trübbach
, ,
Serial Number
UK00801280637 filed on 22nd May 2015
Registration Number
UK00801280637 registered on
8th Nov 2016
Correspondent Information
Otto Pfeifer Patentanwälte Schütz und Partner
Schottenring 16 Börsegebäude
Wien,
1010
Machines and machine tools, in particular vacuum treatment installations; vacuum coating facilities and vacuum cleaning installations; mechanical tools (mechanical construction) for all types of surface treatment, in particular tools (mechanical construction) for the physical and chemical cleaning, structuring, or removing of layers and mechanical processing (in particular of substrates to be coated in a vacuum installation); coating machines of all kinds, in particular coating machines for the production of surface layers, installations (machines) for coating of all kinds, in particular steaming installations, electron beam evaporators, ion beam installations, ion beam sputtering installations, PVD, CVD, PECVD installations, cathodic sputtering installations, and plasma spraying installations; machines for changing the surfaces of objects; installations for manufacturing semiconductors, integrated circuits, collectors (electric); machines for the manufacture of surface coatings on instruments of all kinds, in particular the lenses of glasses, contact lenses, mirrors, optical or electrical filters, architectural glass substrates for solar cells or solar cell modules, display substrates or modules, in particular computer screens, illumination layers, organic light-emitting diodes; machine parts for vacuum treatment installations, namely cathodic sputtering cathodes, plasma spraying installations, cathodic sputtering shields, sputtering armor, sputtering masks, evaporation coating filaments for vacuum coating, shuttles, ceramic crucibles, substrate carriers, and gas introduction systems.
Electronic devices and instruments for regulating, controlling, and monitoring; electronic devices and instruments for the controlling and treatment of surfaces; optical, electric, magnetic, spectroscopic sensors; measuring and control devices, namely for measuring the growth of layers or the removal of coatings in thin-film processing installations; optical controllers and devices for measuring layer thickness of crystal oscillators, scientific instruments, namely chip media cleaners for the surface cleaning of electronic components, plasma cleaning units for the pre-treatment of substrates which are to be coated in a vacuum installation or in support of coating processes; laboratory devices and instruments, namely thin film technology accessories, in particular sputtering cathodes, plasma sources, sputtering targets, sputtering shields, sputtering masks, vacuum coating filaments, vacuum coating shuttles, ceramic crucibles, substrate carriers, and gas introduction systems; computer programs, in particular for regulating, controlling, and monitoring surfaces and surface treatments; vacuum measuring devices; sputtering cathodes; quartz crystals for measuring layer thickness.
Industrial assembly, installation, implementation, and maintenance of vacuum devices and vacuum generation installations of all kinds.
UK00801280637
Word
Individual