on 11 Sept 1998
Last Applicant/ Owned by
Ulvac Inc.
2500 Hagisono, Chigasaki
Kanagawa, , 253-8543
Serial Number
UK00900927681 filed on 11th Sept 1998
Registration Number
UK00900927681 registered on
26th Jan 2000
Correspondent Information
Withers & Rogers LLP
2 London Bridge
London,
SE1 9RA
Semiconductor wafer processing equipment, namely microwave and RF plasma chamber for removing photoresist.
UK00900927681
Word
Individual