DFC

Class [9]
Computer & Software Products & Electrical & Scientific Products

Plasma source apparatus; plasma source semiconductor fabrication equipment; plasma generation systems, plasma processing systems, plasma etch systems, plasma deposition systems, plasma strip systems, plasma treatment systems and plasma reactors; apparatus for abatement of toxic gases and by-products of plasma reactions; thin film processing apparatus; wafer processing apparatus; etch technology processing apparatus; deposition technology processing apparatus; apparatus for use in the manufacture and processing of computer hardware, computer software, and computer components; apparatus for use in the manufacture and processing of wafers, semiconductors, substrates incorporating semiconductors, integrated circuits, and flat panel displays; parts and fittings for all the aforesaid goods.