on 27 May 1998
Last Applicant/ Owned by
STEAG MicroTech GmbH
Carl-Benz-Strasse 10, 72124 Pliezhausen, Germany
, ,
Serial Number
UK00002167680 filed on 27th May 1998
Registration Number
UK00002167680 registered on
9th Apr 1999
Correspondent Information
Dr Walther Wolff & Co
Sherwood House,, 5 Bluecoats Avenue
Hertford,
Hertfordshire,
SG14 1PB
Machines, machine tools, apparatus, installations and plant, all for use in manufacture, processing and treatment of semiconductor substrates, silicon slices, wafers, liquid crystal display substrates, liquid crystal display devices, semiconductor chips, solar cells and electronic and opto-electronic articles; machines, machine tools, apparatus, equipment, installations and plant, all for processing, treatment, machining, coating, polishing, cleaning, drying/dry treatment and wet treatment of substrates, slices, wafers and chips; parts and fittings for all the aforesaid goods.
Apparatus for drying/dry treatment and wet treatment of semiconductor substrates, silicon slices, wafers, liquid crystal display substrates, liquid crystal display devices, semiconductor chips, solar cells and electronic and opto-electronic articles, including the surfaces thereof; apparatus for drying, moistening and wetting; parts and fittings for all the aforesaid goods.
Installation, maintenance, repair and servicing of machines, machine tools, apparatus, equipment and plant used in manufacture, processing, treatment, machining, drying wetting, cleaning, coating and polishing of substrates, wafers, silicon slices, liquid crystal display devices, solar cells and electronic and opto-electronic articles, including the surfaces thereof and parts thereof and therefor.
UK00002167680
Word
Individual