on 23 Aug 2023
Last Applicant/ Owned by
Atlant 3D Nanosystems, LTD.
Mårkærvej 2B, Taastrup
Denmark, , 2630
Serial Number
UK00003948950 filed on 23rd Aug 2023
Registration Number
UK00003948950 registered on
5th Jan 2024
Correspondent Information
ip21 Limited
Central Formalities Department, Suite 2, The Old Dairy, Elm Farm Business Park, Wymondham, Norwich
Norfolk,
NR18 0SW
Apparatus and instruments for thin film processing, namely, direct atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, atomic layer epitaxy, etch tools for atomic layer etching and cluster tools for etching; machines and instruments for thin film processing, namely, atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, atomic layer epitaxy, etch tools for atomic layer etching and cluster tools for etching with automated handling.
Data processing equipment; computers; computer programs for controlling and monitoring atomic scale layer deposition apparatus; computers and computer programs for atomic scale layer deposition apparatus.
Treatment and coating of materials by atomic scale layer deposition method and consulting connected thereto.
UK00003948950
Word
Individual