CALAMOS

Class [9]
Computer & Software Products & Electrical & Scientific Products

Computer servers comprising software (application) for instructing a high precision electronic apparatus to measure overlapping correction values by measuring the alignment marks on semiconductor wafers, calculating correction values by analyzing calculated measurement values, and transmitting the correction value thereof to a semiconductor lithography apparatus; computer servers used by connecting to a high precision electronic apparatus for measuring semiconductor wafers for use in the semiconductor industry; computer servers comprising software (application); computer servers comprising software (application) for apparatus for measuring semiconductor wafers; computer servers; computer software; computer software for semiconductor manufacturing machines and systems; computer software for semiconductor lithography apparatus; computer software for use in processing semiconductor wafers; computer software for apparatus for measuring semiconductor wafers.