Class [7]
Machinery Products
Apparatus and instruments for thin film processing, namely, direct atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, atomic layer epitaxy, etch tools for atomic layer etching and cluster tools for etching; machines and instruments for thin film processing, namely, atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, atomic layer epitaxy, etch tools for atomic layer etching and cluster tools for etching with automated handling.
Class [9]
Computer & Software Products & Electrical & Scientific Products
Prototype parts for product development employing micro electro-mechanical systems (mems) and other micro-scale and meso-scale technology, namely, mems electrical relays, mems circuit breakers, mems current sensors, mems microphones, mems speakers, mems photomultipliers, mems signal mirrors for beam steering, microfluidic flow cells, namely, flow-based analyzers for scientific or laboratory use; microfluidic chips, micro-scale electrical connectors, micro-scale electromagnetic coils, micro-scale magnetic and electromagnetic actuators, micro-scale magnetic field measurement devices and structural parts therefore; optical devices and components, namely, light emitting diodes (leds), lasers not for medical use, plasma light sources, optical sensors, optical lenses, and optical mirrors; downloadable computer software for designing and controlling manufacturing of mems electrical relays, mems photomultipliers, microfluidic flow cells, microfluidic chips; computers and computer programs for atomic scale layer deposition apparatus.
