on 5 Dec 2006
Last Applicant/ Owned by
MATTSON THERMAL PRODUCTS GMBH
Daimlerstr. 10 89160 Dornstadt
, ,
Serial Number
UK00800917902 filed on 5th Dec 2006
Registration Number
UK00800917902 registered on
26th May 2008
Correspondent Information
Dr. Ulrich F. Geyer WAGNER & GEYER
Gewürzmühlstr. 5 80538 München
,
Maintenance and installation of machines for the treatment of substrates, semiconductor substrates, silicon discs and wafers for semiconductor chip manufacturing and for making semiconductor film or layer structures (expitaxial-reactors) and of apparatuses, devices, machines and systems consisting thereof for the thermal treatment of substrates, semiconductor substrates, silicon discs and wafers for the production of semiconductor chips; rapid heating apparatuses for the treatment and production of semiconductors, in particular on the basis of halogen lamps and arc lamps.
Developing machines for the treatment of substrates, semiconductor substrates, silicon discs and wafers for semiconductor chip manufacturing and for making semiconductor film or layer structures (expitaxial-reactors) and apparatuses, devices, machines and systems consisting thereof for the thermal treatment of substrates, semiconductor substrates, silicon discs and wafers for the production of semiconductor chips; rapid heating apparatuses for the treatment and production of semiconductors, in particular on the basis of halogen lamps and arc lamps.
UK00800917902
Word
Individual