on 6 Feb 2007
Last Applicant/ Owned by
Merck KGaA
Frankfurter Str. 250
Darmstadt, , 64293
Serial Number
UK00905666979 filed on 6th Feb 2007
Registration Number
UK00905666979 registered on
16th Jan 2008
Correspondent Information
AA Thornton IP LLP
Octagon Point, 5 Cheapside
London,
EC2V 6AA
Chemical precursors for depositing silicon nitride films in semiconductor devices.
UK00905666979
Word
Individual